%PDF-1.3 % 1 0 obj << /Type /Page /Parent 14 0 R /Resources 4 0 R /Contents 3 0 R >> endobj 2 0 obj << /Subject (dip_coating_photoresist) /Producer (Acrobat Distiller 6.0.1 \(Windows\)) /Keywords () /Creator (Adobe PageMaker 7.0) /ModDate (D:20091105143551+01'00') /Title (dip_coating_photoresist) /Author (Christian) /CreationDate (D:20091105143550+01'00') >> endobj 3 0 obj << /Length 26849 >> stream q 1 i 538.6 695.85 -206.35 89.35 re 332.25 695.85 m W n /GS1 gs q 206.349976 0 0 89.349991 332.25 695.850037 cm /Im1 Do Q Q /Cs8 cs 0 scn /GS1 gs 29.71 693.31 284.43 91.38 re f /Cs8 CS 0 SCN 0 J 0 j 1.02 w 1000 M []0 d 1 i 29.71 784.69 284.43 -91.38 re S BT /TT2 1 Tf 22 0 0 22 108.95 766.61 Tm /Cs10 cs 1 scn -0.0015 Tc 0.0114 Tw (Spray Coating o)Tj ET q 30.22 784.18 283.41 -90.36 re W* n BT 22 0 0 22 304.378 766.61 Tm 0 Tc 0 Tw (f)Tj ET Q BT 22 0 0 22 159.29 740.21 Tm 0.0002 Tc 0 Tw (Photoresists)Tj 8 0 0 8 219.35 709.19 Tm 0 0 0 1 k 0.0009 Tc -0.0125 Tw (Revised: 2009-11-05)Tj -19.545 -1.4775 TD -0.0016 Tc -0.0187 Tw (Source: www.microchemicals.eu/technical_information)Tj ET /Cs11 cs 1 scn 70.85 56.55 467.75 26.95 re f BT 9 0 0 9 77.99 73.67 Tm /Cs8 cs 0 scn 0.0007 Tc -0.0048 Tw (Photoresists, developers, remover, adhesion promoters, etchants, and solvents ...)Tj /TT4 1 Tf 0 -1.4533 TD -0.0008 Tc 0.0049 Tw [(Phone: +49 731 36080-409)-1654.1( )-21.9( )-21.9(www)32.5(.microchemicals.eu)-2914.1(e-Mail: )-29(sales@microchemicals.eu)]TJ /TT2 1 Tf 12 0 0 12 70.91 656.57 Tm /Cs10 cs 1 scn -0.0003 Tc 0 Tw (Spray Coating: Basics and Motivation)Tj /TT4 1 Tf 10 0 0 10 70.91 640.91 Tm 0 0 0 1 k 0.0058 Tc 0.0349 Tw [(Spr)17.8(a)12.4(y)0.1( coating denotes the formation of a resist film via millions of m-siz)5.8(ed resist droplets)]TJ 0 -1.2 TD 0.0015 Tc 0.0351 Tw [(moving tow)7.5(ards the substr)19.5(ate. This coating technique allows a - at least in principle - lower)]TJ T* 0 Tc 0.0046 Tw [(resist consumption as compared to spin coating. The main adv)24(antage, howev)12(er)138(, is the possi-)]TJ T* -0.0001 Tc 0.0295 Tw [(bility to coat arbitr)23.9(ary shaped and textured substr)23.9(ates where spin coating cannot attain sat)17.9(-)]TJ T* 0.0039 Tw [(isf)5.9(ying results by means of film thickness homogeneit)5.9(y and edge cov)15.7(e)2.4(r)17.9(age.)]TJ /TT2 1 Tf 12 0 0 12 70.91 571.37 Tm /Cs10 cs 1 scn -0.0002 Tc -0.0042 Tw (Atomized Spray Formation)Tj /TT4 1 Tf 10 0 0 10 70.91 555.77 Tm 0 0 0 1 k -0.0004 Tc 0.0006 Tw [(Each technology for droplet gener)17.6(ation requires a certain low resist viscosit)5.6(y of usually a few)]TJ T* 0.0301 Tc 0.035 Tw [(cSt. V)54.1(arying the resist viscosit)6.1(y impacts on the droplet)]TJ T* 0.0165 Tc 0.0349 Tw [(gener)22.5(ation r)22.5(ate as well as the droplet diameter distribu-)]TJ T* -0.001 Tc 0 Tw (tion.)Tj 0 -1.428 TD 0.0117 Tc 0.0349 Tw [(When diluting resists with a solv)11.7(ent, one has to consider)]TJ 0 -1.2 TD 0.0142 Tc 0.035 Tw [(possible incompatibilities of certain solv)14.2(ents with the re-)]TJ T* 0.0211 Tc (sist, as well as the fact that highly diluted photo resists)Tj T* 0.0025 Tc 0.0349 Tw [(gener)20.5(ally rev)14.5(eal an acceler)14.5(ated ageing of the resist in the)]TJ T* 0 Tc 0.0007 Tw (diluted state with particle formation as a consequence.)Tj /TT2 1 Tf 12 0 0 12 70.91 436.01 Tm /Cs10 cs 1 scn -0.0001 Tc -0.0083 Tw (Solvent Evaporation during Flight)Tj /TT4 1 Tf 10 0 0 10 70.91 420.35 Tm 0 0 0 1 k 0.0223 Tc 0.035 Tw [(A certain solv)16.3(ent ev)22.3(apor)22.3(ation out of the droplets during)]TJ T* -0.0001 Tc 0.0137 Tw [(flight \(between spr)17.9(a)12.5(y)0( nozzle and substr)17.9(ate\) is required for)]TJ T* -0.0003 Tc 0.0001 Tw [(a sufficient resist edge co)5.7(v)9.5(e)2.2(r)23.7(age onto textured substr)17.7(ates:)]TJ T* 0.0158 Tc 0.0349 Tw [(The hereby increased resist viscosity prev)9.8(ents the resist)]TJ T* -0.0001 Tc 0.0009 Tw [(from macroscopically flowing on the substr)23.9(ate.)]TJ 0 -1.422 TD 0.0291 Tc 0.0351 Tw [(If)65.1(, howev)5.1(er)143.1(, too much solv)11.1(ent ev)23.1(apor)23.1(ates during flight,)]TJ 0 -1.2 TD -0.0004 Tc -0.0133 Tw [(this prev)5.6(ents the droplets from sticking to the substr)17.6(ate or)]TJ T* 0.005 Tw (at least causes a rough surface.)Tj 0 -1.428 TD 0.0063 Tc 0.0348 Tw [(The par)12.3(ameters temper)18.3(ature, droplet v)6.3(elocit)6.3(y \(relativ)6.3(e to)]TJ 0 -1.2 TD -0.0001 Tc 0.0079 Tw [(the ambient air\), and air solv)11.9(ent satur)17.9(ation, as well as the)]TJ T* 0.0349 Tc 0.1781 Tw [(solv)10.9(ent composition and concentr)16.9(ation determine the)]TJ T* 0.0343 Tc 0.1019 Tw [(ev)16.3(apor)16.3(ation r)22.3(ate for each droplet as a function of the)]TJ T* 0.002 Tc 0.035 Tw [(droplet surface. This surface concentr)20(ation again depends)]TJ T* 0.0002 Tc 0.029 Tw [(on the temper)24.2(ature- and solv)6.2(ent concentr)24.2(ation dependant)]TJ T* 0.01 Tc 0.035 Tw [(diffusion constant of the solv)10(ent from the droplet bulk to)]TJ T* -0.0003 Tc 0.005 Tw (its surface.)Tj /TT2 1 Tf 12 0 0 12 70.91 214.37 Tm /Cs10 cs 1 scn 0.0041 Tw (Wetting and Edge Coverage)Tj /TT4 1 Tf 10 0 0 10 70.91 198.71 Tm 0 0 0 1 k 0.0006 Tw [(A homogeneous resist film requires a certain flowing of the resist film on the substr)23.7(ate for at)]TJ T* 0.0077 Tc 0.035 Tw [(least few m, thus defining an upper limit for the resist viscosit)7.7(y or)139.7(, respectiv)13.7(ely)91.7(, a certain)]TJ T* 0.0056 Tc 0.0349 Tw [(minimum for the remaining solv)11.6(ent concentr)17.6(ation. A viscosit)5.6(y)93.4(,)0.3( which is too low \(or)137.6(, respec)5.6(-)]TJ T* 0.0017 Tc [(tiv)13.7(ely)97.7(, a remaining solv)7.7(ent concentr)19.7(ation that is too high\) causes macroscopic resist flowing)]TJ T* -0.0003 Tc 0.005 Tw [(thereby reducing the edge cov)15.5(e)2.2(r)17.7(age of the resist film in the case of textured substr)23.7(ates.)]TJ 0 -1.428 TD 0.0021 Tc 0.0349 Tw [(The par)14.1(ameters wetting, edge co)8.1(v)5.9(e)4.6(r)20.1(age, and homogeneit)8.1(y)101.9(,)0( which strongly impact the spr)14.1(a)14.7(y)]TJ 0 -1.2 TD -0.0001 Tc -0.0138 Tw [(coating performance, depend on the initial co)5.9(v)15.7(e)2.4(r)17.9(age of the droplets from the atomized spr)23.9(a)12.5(y)93.7(,)]TJ T* -0.0002 Tc 0.0033 Tw [(the resist adhesion to the substr)23.8(ate, the resist surface tension, and its viscosity)99.6(.)]TJ 0 -1.422 TD -0.0003 Tc 0.0054 Tw [(Therefore, besides the chemical and ph)5.7(ysical resist properties, the atomiz)5.7(ed spr)17.7(a)12.3(y)0.5( formation)]TJ ET q 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re W n 454.79 555.29 66.6 28.14 re f 0 G 1 J 1 j 0.6 w 10 M []0 d 521.39 583.43 -66.6 -28.14 re 454.79 583.43 m s BT 9.5899 0 0 9.5899 456.59 571.43 Tm 0 g 0.0226 Tc [(PG)47.2(M)52(E)29.3(A)]TJ 0 -1.2451 TD -0.0101 Tc 0.0339 Tw [(20)-31.2(C 1 m)24.1(/)6(s)]TJ ET 0.06 w 313.19 601.43 m 313.19 601.43 l S Q 112.19 640.13 163.14 116.34 re f q 1 i 112.19 656.51 163.14 0.78003 re W n 0 G 1 J 1 j 0.6 w 10 M []0 d 112.19 656.93 m 275.33 656.93 l S Q q 1 i 112.19 672.71 163.14 0.77997 re W n 0 G 1 J 1 j 0.6 w 10 M []0 d 112.19 673.13 m 275.33 673.13 l S Q q 1 i 112.19 689.51 163.14 0.78003 re W n 0 G 1 J 1 j 0.6 w 10 M []0 d 112.19 689.93 m 275.33 689.93 l S Q q 1 i 112.19 706.31 163.14 0.77997 re W n 0 G 1 J 1 j 0.6 w 10 M []0 d 112.19 706.73 m 275.33 706.73 l S Q q 1 i 112.19 723.05 163.14 0.77997 re W n 0 G 1 J 1 j 0.6 w 10 M []0 d 112.19 723.47 m 275.33 723.47 l S Q q 1 i 112.19 739.25 163.14 0.78003 re W n 0 G 1 J 1 j 0.6 w 10 M []0 d 112.19 739.67 m 275.33 739.67 l S Q q 1 i 112.19 756.05 163.14 0.77997 re W n 0 G 1 J 1 j 0.6 w 10 M []0 d 112.19 756.47 m 275.33 756.47 l S Q 0 G 1 J 1 j 0.6 w 10 M []0 d 1 i 112.19 756.47 m 275.33 756.47 l 275.33 640.13 l 112.19 640.13 l 112.19 756.47 l S q 114.23 640.13 11.58 11.76 re W n 0.602 0.602 1 rg 114.59 651.53 m 114.59 651.53 10.8 -11.4 re B* Q q 130.43 640.13 11.58 104.7 re W n 0.602 0.602 1 rg 130.79 640.13 10.8 104.34 re f 130.79 744.47 m 130.79 744.47 10.8 -104.34 re S Q 0.602 0.602 1 rg 146.99 640.13 11.4 97.14 re f q 146.63 640.13 12.18 97.5 re W n 146.99 737.27 m 146.99 737.27 11.4 -97.14 re S Q q 163.43 640.13 11.58 74.76 re W n 163.79 714.53 m 163.79 714.53 10.8 -74.4 re B* Q q 179.57 640.13 11.58 56.16 re W n 179.93 695.93 m 179.93 695.93 10.8 -55.8 re B* Q q 195.77 640.13 11.58 39.36 re W n 196.13 679.13 m 196.13 679.13 10.8 -39 re B* Q q 211.97 640.13 11.58 25.56 re W n 212.33 665.33 m 212.33 665.33 10.8 -25.2 re B* Q q 228.17 640.13 12.18 15.36 re W n 228.53 655.13 m 228.53 655.13 11.4 -15 re B* Q q 244.97 640.13 11.58 8.16 re W n 245.33 647.93 m 245.33 647.93 10.8 -7.8 re B* Q q 261.17 640.13 11.58 4.56 re W n 261.53 644.33 m 261.53 644.33 10.8 -4.2 re B* Q 112.19 756.47 m 112.19 640.13 l 114.59 640.13 l 112.19 643.73 m 114.59 643.73 l 112.19 646.73 m 114.59 646.73 l 112.19 650.33 m 114.59 650.33 l 112.19 653.33 m 114.59 653.33 l 112.19 656.93 m 114.59 656.93 l 112.19 659.93 m 114.59 659.93 l 112.19 663.53 m 114.59 663.53 l 112.19 666.53 m 114.59 666.53 l 112.19 670.13 m 114.59 670.13 l 112.19 673.13 m 114.59 673.13 l 112.19 676.73 m 114.59 676.73 l 112.19 680.33 m 114.59 680.33 l 112.19 683.33 m 114.59 683.33 l 112.19 686.93 m 114.59 686.93 l 112.19 689.93 m 114.59 689.93 l 112.19 693.53 m 114.59 693.53 l 112.19 696.53 m 114.59 696.53 l 112.19 700.13 m 114.59 700.13 l 112.19 703.13 m 114.59 703.13 l 112.19 706.73 m 114.59 706.73 l 112.19 709.73 m 114.59 709.73 l 112.19 713.33 m 114.59 713.33 l 112.19 716.33 m 114.59 716.33 l 112.19 719.93 m 114.59 719.93 l 112.19 723.47 m 114.59 723.47 l 112.19 726.47 m 114.59 726.47 l 112.19 730.07 m 114.59 730.07 l 112.19 733.07 m 114.59 733.07 l 112.19 736.67 m 114.59 736.67 l 112.19 739.67 m 114.59 739.67 l 112.19 743.27 m 114.59 743.27 l 112.19 746.27 m 114.59 746.27 l 112.19 749.87 m 114.59 749.87 l 112.19 752.87 m 114.59 752.87 l 112.19 756.47 m 114.59 756.47 l 109.19 640.13 m 112.19 640.13 l 109.19 656.93 m 112.19 656.93 l 109.19 673.13 m 112.19 673.13 l 109.19 689.93 m 112.19 689.93 l 109.19 706.73 m 112.19 706.73 l 109.19 723.47 m 112.19 723.47 l 109.19 739.67 m 112.19 739.67 l 109.19 756.47 m 112.19 756.47 l 112.19 640.13 m 275.33 640.13 l 120.59 640.13 m 120.59 642.53 l 136.79 640.13 m 136.79 642.53 l 152.99 640.13 m 152.99 642.53 l 169.19 640.13 m 169.19 642.53 l 185.33 640.13 m 185.33 642.53 l 202.13 640.13 m 202.13 642.53 l 218.33 640.13 m 218.33 642.53 l 234.53 640.13 m 234.53 642.53 l 250.73 640.13 m 250.73 642.53 l 266.93 640.13 m 266.93 642.53 l 112.19 637.13 m 112.19 640.13 l 128.39 637.13 m 128.39 640.13 l 144.59 637.13 m 144.59 640.13 l 161.39 637.13 m 161.39 640.13 l 177.53 637.13 m 177.53 640.13 l 193.73 637.13 m 193.73 640.13 l 209.93 637.13 m 209.93 640.13 l 226.13 637.13 m 226.13 640.13 l 242.93 637.13 m 242.93 640.13 l 259.13 637.13 m 259.13 640.13 l 275.33 637.13 m 275.33 640.13 l S BT 9.5932 0 0 9.5932 98.39 635.93 Tm 0 g 0 Tc (0)Tj -1.0007 1.7512 TD -0.0103 Tc [(0,)-21.8(2)]TJ 0 1.6887 TD [(0,)-21.8(4)]TJ 0 1.7512 TD [(0,)-21.8(6)]TJ T* [(0,)-21.8(8)]TJ 1.0007 1.745 TD 0 Tc (1)Tj -1.0007 1.6887 TD -0.0103 Tc [(1,)-21.8(2)]TJ 0 1.7512 TD [(1,)-21.8(4)]TJ 0 9.5932 -9.5932 0 124.43 610.79 Tm [(0,)-21.8(31)]TJ 0 -1.6887 TD [(0,)-21.8(58)]TJ T* [(0,)-21.8(85)]TJ T* [(1,)-21.8(12)]TJ 0 -1.6824 TD [(1,)-21.8(39)]TJ 0 -1.7512 TD [(1,)-21.8(65)]TJ 0 -1.6887 TD [(1,)-21.8(92)]TJ T* [(2,)-21.8(19)]TJ T* [(2,)-21.8(46)]TJ T* [(2,)-21.8(73)]TJ 9.5932 0 0 9.5932 127.79 601.19 Tm 0.0438 Tc -0.0201 Tw [(D)63.8(r)95.3(o)25.3(p)41.4(l)5.5(e)14.1(t S)102(t)6.3(a)18.9(r)95.3(t R)51.1(a)18.9(d)41.4(i)5.5(u)51.2(s)1.9( \()]TJ /TT7 1 Tf 11.2517 0 TD 0 Tc 0 Tw ()Tj /TT4 1 Tf 0.6254 0 TD -0.0345 Tc (m\))Tj 0 9.5932 -9.5932 0 80.03 641.33 Tm -0.0085 Tc 0.0322 Tw [(Fr)-19.6(e)-38.2(q)-10.9(ue)-38.2(nc)12.1(y)-42.1( \()7.8(a)-33.4(.)-20( u.)-13.7(\))]TJ 1 g 8.7499 0 TD -0.0103 Tc 0 Tw (___)Tj ET 0 w 59.99 767.27 m 59.99 767.27 l S /Cs14 cs 1 scn 336.477 623.27 m 324.44 636.194 l 324.44 626.609 l 285.541 626.609 l 285.541 618.289 l 324.44 618.289 l 324.44 608.571 l f* /Cs15 CS 1 SCN 0 J 0 j 1.02 w 1000 M 336.477 623.27 m 324.44 636.194 l 324.44 626.609 l 285.541 626.609 l 285.541 618.289 l 324.44 618.289 l 324.44 608.571 l s 330.623 584.904 m 326.661 602.113 l 321.868 593.812 l 288.178 613.259 l 284.017 606.054 l 317.707 586.607 l 312.848 578.192 l f* 1.02 w 330.623 584.904 m 326.661 602.113 l 321.868 593.812 l 288.178 613.259 l 284.017 606.054 l 317.707 586.607 l 312.848 578.192 l s BT 9 0 0 9 70.67 582.05 Tm 0 0 0 1 k 0.0219 Tc 0.0352 Tw [(The bar gr)15.2(aphs to the right plot the results from)]TJ 0 -1.2 TD 0.0208 Tc 0.0349 Tw [(numerical simulation of a spr)20.8(ay fog consisting of)]TJ T* 0.0233 Tc 0.0351 Tw [(droplets with a certain \(histogr)16.6(am abov)8.4(e\) r)16.6(adius)]TJ T* 0.001 Tc 0 Tw (distribution.)Tj 0 -1.4533 TD 0.0193 Tc 0.0348 Tw [(If MEK is used as diluent \(upper right\), ev)26(apor)19.3(a)-6(-)]TJ 0 -1.2 TD -0.0006 Tc 0.034 Tw [(tion causes a significant loss in the droplet solv)6.1(ent)]TJ T* 0.0268 Tc 0.0348 Tw [(concentr)13.5(ation in much less than a second, while)]TJ T* 0.0349 Tc 0.2355 Tw [(PGMEA \(lower right\) ev)21.6(apor)14.9(ates much slower)141.6(.)]TJ T* -0.0005 Tc 0.0118 Tw [(Since the solv)12.8(ent concentr)12.8(ation of the droplets hit)19.5(-)]TJ T* 0.0169 Tc 0.0351 Tw [(ting the substr)23.6(ate reflects the solv)10.2(ent concentr)16.9(a-)]TJ T* 0.0038 Tc 0.0347 Tw (tion of the resist film formed, choosing the proper)Tj T* 0.0074 Tc 0.0353 Tw [(solv)14.1(ent\(s\) strongly impacts the resist edge co)7.4(v)12.5(e)-3.5(r)7.4(-)]TJ T* -0.0006 Tc 0.0104 Tw [(age. Please not the different scale in the y)26.1(-)6.8(axis!)]TJ ET q 281.65 291.7 -210.8 135.55 re 70.85 291.7 m W n q 210.799988 0 0 135.549988 70.849991 291.700012 cm /Im2 Do Q Q q 533.25 291.7 -210.8 135.55 re 322.45 291.7 m W n q 210.799988 0 0 135.549988 322.450012 291.700012 cm /Im3 Do Q Q q 210.799988 0 0 135.549988 70.849991 126.650017 cm /Im4 Do Q q 533.25 126.65 -210.8 135.55 re 322.45 126.65 m W n q 210.799988 0 0 135.549988 322.450012 126.650017 cm /Im5 Do Q Q BT 9 0 0 9 70.85 281.27 Tm -0.0011 Tc 0.0158 Tw [(F)20.3(ew o)5.6(v)4(erlapping droplets)]TJ 27.9467 0.1067 TD -0.0008 Tc 0.0153 Tw [(R)21.2(esist film not completely closed)]TJ -27.9467 -1.88 TD -0.001 Tc 0.0102 Tw [(Closed 1 m film, roughness appro)5.7(x. 300 nm)-5121(Closed 3 m film, roughness appro)5.7(x. 150 nm)]TJ ET 329.8 196.251 m 316.7 203.351 l 316.7 198.001 l 269.301 198.001 l 269.301 193.601 l 316.7 193.601 l 316.7 188.251 l f* 329.8 354.95 m 316.7 362.05 l 316.7 356.7 l 269.301 356.7 l 269.301 352.3 l 316.7 352.3 l 316.7 346.95 l f* 281.306 260.094 m 297.639 266.387 l 293.856 270.171 l 334.724 311.044 l 331.613 314.155 l 290.745 273.282 l 286.963 277.065 l f* BT 9 0 0 9 70.85 114.17 Tm -0.0006 Tc 0.0106 Tw [(The figures abov)11.2(e)0( show snapshots during the formation of a resist film via spr)12.7(a)6.7(y)-0.2( coating.)]TJ ET endstream endobj 20 0 obj << /ProcSet [ /PDF /Text /ImageC /ImageI ] /Font << /TT2 5 0 R /TT4 6 0 R /TT7 21 0 R >> /XObject << /Im2 22 0 R /Im3 23 0 R /Im4 24 0 R /Im5 25 0 R >> /ExtGState << /GS1 9 0 R >> /ColorSpace << /Cs8 10 0 R /Cs11 13 0 R /Cs12 26 0 R /Cs13 27 0 R /Cs14 28 0 R /Cs15 29 0 R /Cs16 30 0 R /Cs17 31 0 R /Cs18 32 0 R /Cs19 33 0 R >> >> endobj 21 0 obj << /Type /Font /Subtype /TrueType /FirstChar 181 /LastChar 181 /Widths [ 640 ] /Encoding /MacRomanEncoding /BaseFont /CIPHHD+Verdana /FontDescriptor 58 0 R >> endobj 22 0 obj << /Type /XObject /Subtype /Image /Width 560 /Height 360 /BitsPerComponent 8 /ColorSpace 30 0 R /Length 63377 /Filter /FlateDecode >> stream H̗rD6[ (?YU@C:3HIl6^gfWS/˲ gAFmI(ݠt:F'MM~&yv.r<^?hcRX}]!~u8޸bΡU$I\Bl\uֶV zޟO|E,_耚г$[caq/-\aBN(\wˉx9_q쾋"1 4Xsr)@702.=$9y?IvD/h\٫/`IZq^>rsOf2PFy_U?42|C\4hgE,g^JF BZ|e</'] }g.I\i)T衖dd8HBa^kv\y2̋+@3KL"/X:ryoBn@3iK IrZ1O(lFnC] ^p~/T|>m.iAKѺnn.,/y38' C_Zlnh(^1En"BRnY/cζր`Dž/L̦0lIW hԩ7Yɕ SX"8(14˓640>Ab@udO\}zČ'dLe"y /;207r~),5̏[$/ł=i\L}Y\biaA2>[ϺjfoqpU٠Y@HI FxQF;C].WUiS%Е#i16 z])b&OӢL/i&Rt>o+.MgmR+Z.oQ. 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